Thin film transistor with reduced hydrogen passivation process t

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Amorphous semiconductor material

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Details

257347, 257348, 257349, 257350, 257351, 257352, 257353, 257751, H01L 2900

Patent

active

061181390

ABSTRACT:
A thin film field effect transistor includes source and drain regions, an active region sandwiched by the source and drain semiconductor regions. A gate insulating film is provided to cover the source and drain regions and the active region, and a semiconductor gate is formed on the gate insulating film above the active region. A gate electrode is formed on the semiconductor gate such that a non-covering portion where the gate electrode does not cover the semiconductor gate is formed.

REFERENCES:
patent: 4141022 (1979-02-01), Sigg et al.
patent: 5739549 (1998-04-01), Takamura et al.

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