Active solid-state devices (e.g., transistors, solid-state diode
Non-single crystal, or recrystallized, semiconductor...
Amorphous semiconductor material
Inventor
active
Chemical vapor deposition method
Method for depositing a silicon oxide film
Method of forming silicon oxide film and forming apparatus...
Method of manufacturing thin film transistor
Method of manufacturing thin film transistor
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Profile ID: LFUS-PAI-P-211826