Automatic contaminants detection apparatus

Details Automatic contaminants detection apparatus Automatic contaminants detection apparatus

1984-05-18

1986-09-30

McGraw, Vincent P.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356 73, G01N 2188, G01N 2121

Patent

active

046144277

ABSTRACT:
An automatic contaminants detection apparatus comprises a polarized laser beam source, a polarized laser beam irradiation optical system having irradiation angle switching means for switching an irradiation angle depending on the presence or absence of a pattern on a sample surface to irradiate the polarized laser beam emitted by the polarized laser beam source to the sample surface with an angle of grazing, a detector for detecting condensed scattered or reflected lights of the laser beam from the sample surface with or without interleave of an analyzer, and analyzer switching means for inserting or removing the analyzer into or from a detection light path of the detector depending on the presence or absence of the pattern on the sample surface. The apparatus can detect contaminants on the patterned or non-patterned sample surface with a high sensitivity.

REFERENCES:
patent: 3790286 (1974-02-01), Kraus
patent: 3850525 (1974-11-01), Kaye
patent: 4342515 (1982-08-01), Akiba et al.
Koizumi et al., "A Polarized Laser Scan Technique for Semiconductor Surface Contaminants Inspection", International Commision for Optics, Aug. 1984.
Akiyama et al., "Automatic Inspection of Foreign Particles on Patterned Sample by Means of Polarized Laser", Transactions of the Society of Instrument and Control Engineers, pp. 237-242.

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