Semiconductor integrated-circuit capacitor having a carbon film

Details Semiconductor integrated-circuit capacitor having a carbon film Semiconductor integrated-circuit capacitor having a carbon film

1993-07-16

1995-08-08

Mintel, William

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257741, 257750, H01L 2943, H01L 2992

Patent

active

054401577

ABSTRACT:
A semiconductor integrated-circuit capacitor comprises a lower electrode formed on a semiconductor substrate, a capacitor insulating film formed on the lower electrode, and an upper electrode formed on the capacitor insulating film. The capacitor insulating film is made of a high-permittivity material, and at least one of the upper and lower electrodes is made of a carbon film or a multilayered film composed of a carbon film and a conductor film other than carbon.

REFERENCES:
patent: 4380803 (1983-04-01), Tuan
patent: 4472726 (1984-09-01), DiMaria et al.
patent: 4897710 (1990-01-01), Suzuki et al.
patent: 5124777 (1992-06-01), Lee
patent: 5206787 (1993-04-01), Fujioka

Affiliated with

Also associated with

Rating

Semiconductor integrated-circuit capacitor having a carbon film does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor integrated-circuit capacitor having a carbon film , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor integrated-circuit capacitor having a carbon film will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-973293