Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics
Patent
1996-07-19
1998-03-17
Thomas, Tom
Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Passive components in ics
257640, 257665, H01L 2702
Patent
active
057290415
ABSTRACT:
An integrated circuit includes a conductive fusible link that may be blown by heating with laser irradiation, The integrate circuit comprises a silicon substrate; a first insulating layer; a fusible link on the first layer; a second insulating layer overlying the first layer and the fusible link; an opening through the second layer exposing the fuse; and a protective layer over the surfaces of the opening. A laser beam is irradiated through the opening and the protective layer to melt the fusible link. The protective layer is highly transparent to a laser beam and does not interfere with the laser melting (trimming) operation. Moreover, the protective layer prevents contaminates from diffusing in through the opening to harm adjacent semiconductor devices,
REFERENCES:
patent: 4469985 (1984-09-01), Inoue et al.
patent: 4536949 (1985-08-01), Takayama et al.
patent: 4618541 (1986-10-01), Forouhi et al.
patent: 4795720 (1989-01-01), Kawanabe et al.
patent: 5025300 (1991-06-01), Billig et al.
patent: 5041897 (1991-08-01), Machida et al.
patent: 5065222 (1991-11-01), Ishii
patent: 5241212 (1993-08-01), Montonami et al.
patent: 5329152 (1994-07-01), Janai et al.
patent: 5365104 (1994-11-01), Godinho et al.
patent: 5486719 (1996-01-01), Sugiura et al.
patent: 5578861 (1996-11-01), Kinoshita et al.
patent: 5585662 (1996-12-01), Ogawa
patent: 5592004 (1997-01-01), Tamura et al.
Lee Jin-Yuan
Yoo Chue-San
Ackerman Stephen B.
Hardy David B.
Saile George O.
Stoffel William J.
Taiwan Semiconductor Manufacturing Company Ltd
LandOfFree
Protective film for fuse window passivation for semiconductor in does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Protective film for fuse window passivation for semiconductor in, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Protective film for fuse window passivation for semiconductor in will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-960468