Anti-reflective coating composition

Details Anti-reflective coating composition Anti-reflective coating composition

1995-11-30

1997-01-28

Brunsman, David

Compositions: coating or plastic

Materials or ingredients

Pigment, filler, or aggregate compositions, e.g., stone,...

1062173, 524 89, 524110, 524188, C09D 532, C09D10102, C09D10500, C09D20106

Patent

active

055974082

ABSTRACT:
A composition having 1.0-50.0 wt % of a compound having both a structure of organosilane, organosilazane, or organosiloxazane and a structure of a dye compound which has light-absorbing capabilities in a particular wavelength band, 50.0-99.0 wt % of solvent, and optionally 0"10 wt % of a water-soluble polymer, improves adhesion to a photoresist film and anti-reflection characteristics in exposure.

REFERENCES:
patent: 4251282 (1981-02-01), Vahlensieck et al.
patent: 4613667 (1986-09-01), Marraccini et al.
patent: 5482547 (1996-09-01), Bugnon et al.

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