Scanning probe microscope having cantilever attached to driving

Details Scanning probe microscope having cantilever attached to driving Scanning probe microscope having cantilever attached to driving

1997-10-28

2000-02-01

Larkin, Daniel S.

Measuring and testing

Surface and cutting edge testing

Roughness

G01B 528

Patent

active

060189916

ABSTRACT:
An apparatus includes an X-direction piezoelectric driving member expandable in the X direction upon application of a voltage, and a Y-direction piezoelectric driving member expandable in the Y direction upon application of a voltage. One end of the X-direction piezoelectric driving member is flexibly connected to a frame via a hinge, and the other end of the member is firmly connected to a block. One end of the Y-direction piezoelectric driving member is flexibly connected to the frame via a hinge, and the other end of the member is flexibly connected to the block via a hinge. A probe can be scanned by using this scanning mechanism without causing much fluctuations of the optical axis of a light beam used for the atomic force microscope.

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Werf et al., "Compact stand-alone atomic force microscope", Rev. Sci. Instrum. 64(10), Oct. 1993, pp. 2892-2897.

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