Sensor apparatus and method for real-time in-situ measurements o

Details Sensor apparatus and method for real-time in-situ measurements o Sensor apparatus and method for real-time in-situ measurements o

1992-09-25

1994-12-27

Pellinen, A. D.

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

324715, 3241581, 279128, H02N 1300

Patent

active

053770714

ABSTRACT:
A system 20 for measuring the sheet resistance of a conductive layer on the top surface of a semiconductor wafer 22 is disclosed herein. In one embodiment, the system includes a chuck 30 electrically coupled to the backside surface of the wafer 22. The chuck 30 is capable of supporting the wafer 22 electrostatically. A signal source 40 provides an excitation signal to the wafer 22 and circuitry for monitoring an induced signal is provided. The sheet resistance on the top surface of the wafer 22 is determined from the measurements of the excitation and induced electrical signals. Other systems and methods are also disclosed.

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