Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent
1997-09-03
1999-09-21
Niebling, John F.
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
438649, 438651, 438655, 438658, 438664, 438682, H01L 214763
Patent
active
059566116
ABSTRACT:
Semiconductor devices may be made by forming a silicided layer on a silicon material such as that used to form the extractor of a field emission display. The silicided layer may be self-aligned with the emitter of a field emission display. If the silicided layer is treated at a temperature above 1000.degree. C. by exposure to a nitrogen source, the silicide is resistant to subsequent chemical attack such as that involved in a buffered oxide etching process.
REFERENCES:
patent: 4701349 (1987-10-01), Koyanagi et al.
patent: 4772571 (1988-09-01), Scovell et al.
patent: 5103272 (1992-04-01), Nishiyama
patent: 5229331 (1993-07-01), Doan et al.
patent: 5319279 (1994-06-01), Watanabe et al.
patent: 5789272 (1998-08-01), Wang et al.
A.T.S. Wee, A.C.H. Huan, T. Osipowicz, K.K. Lee, W.H. Thian, K.L. Tan, R. Hogan; "Surface and Interface Studies of Titanium Silicode Formation"; Thin Solid Films (1996), pp. 130-134.
Youn Tae Kim, Chi-Hoon Jun, Jin Ho Lee, Jong Tae Baek, and Hyung Joun Yoo; "TIN Barrier Layer Formation By the Two-Step Rapid Thermal Conversion Process"; Nov./Dec. 1996, pp. 3245-3250.
Cathey, Jr. David A.
Lee John K.
Moradi Behnam
Zhang Tianhong
Micron Technologies, Inc.
Niebling John F.
Zarneke David A.
LandOfFree
Field emission displays with reduced light leakage does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Field emission displays with reduced light leakage, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Field emission displays with reduced light leakage will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-90981