Surface position detecting method and scanning exposure method u

Details Surface position detecting method and scanning exposure method u Surface position detecting method and scanning exposure method u

1997-02-25

1999-07-06

Hantis, K P

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

2505593, G01B 1100

Patent

active

059203986

ABSTRACT:
A surface position detecting method for detecting a surface position of a surface to be examined, having surface height irregularity, while relatively scanning the surface, is disclosed. The method includes detecting characteristic data related to a surface state at plural measurement positions on the surface, while relatively scanning the surface, and processing the detected characteristic data related to the measurement positions to determine a measurement position for measurement of the surface position in a subsequent surface position detecting process.

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