4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Having predetermined light transmission regions

Takehiko Iwanaga

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Aligning method and apparatus detecting misalignment using image

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent

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Exposure apparatus, method of controlling same, and method...

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate

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Exposure apparatus, method of controlling same, and method...

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate

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Illumination device, exposure apparatus and exposure method

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Microdevice manufacturing apparatus

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate

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Profile ID: LFUS-PAI-P-996111

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