Method and apparatus for processing a minute portion of a specim

Details Method and apparatus for processing a minute portion of a specim Method and apparatus for processing a minute portion of a specim

1991-05-30

1993-05-25

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250306, 2504922, H01J 3726

Patent

active

052142825

ABSTRACT:
An image of a specimen which is to be processed is detected by a near-field optical scanning microscope. An image with extremely high resolution for identifying a minute portion of several tens nm is detected. The detected minute portion is processed by, for example, a tunnel current of a scanning tunneling microscope.

REFERENCES:
patent: 4550257 (1985-10-01), Binnig et al.
patent: 4921346 (1990-05-01), Tukomoto et al.
patent: 4983540 (1991-01-01), Yamaguchi et al.
U. Durig et al. "Near-field optical-scanning microscopy", Journal of Applied Physics, vol. 59, No. 10, May 15, 1986, pp. 3318-3327.
H. Sakaki "Scattering Suppression and High-Mobility Effect of Size-Quantized Electrons in Ultrafine Semiconductor Wire Structures," Japanese Journal of Applied Physics, vol. 19, No. 12, Sep. 16, 1980, pp. L735-L738.
Yamaguchi et al. "Method and apparatus for processing a fine pattern" U.S. Patent Application Ser. No. 07/455,155.

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