Photoresist compositions containing quinone sensitizer

Details Photoresist compositions containing quinone sensitizer Photoresist compositions containing quinone sensitizer

1986-07-14

1987-08-04

Martin, Roland E.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430326, 430296, 430919, 430923, G03C 1495

Patent

active

046845992

ABSTRACT:
Positive-working imaging compositions comprise a polymeric binder and a quinone sensitizer which provides alkali solubility to the composition when exposed to activating radiation.

REFERENCES:
patent: 3462267 (1969-08-01), Giangualano et al.
patent: 3779778 (1973-12-01), Smith et al.
patent: 3782939 (1974-01-01), Bonham et al.
patent: 4284704 (1981-08-01), Fleming et al.
patent: 4552830 (1985-11-01), Reardon et al.

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