System for magnification correction of conductive X-ray lithogra

Details System for magnification correction of conductive X-ray lithogra System for magnification correction of conductive X-ray lithogra

1989-07-24

1990-10-16

Church, Craig E.

X-ray or gamma ray systems or devices

Specific application

Lithography

430 5, G21K 500

Patent

active

049641450

ABSTRACT:
A thin film structure for correcting magnification errors in X-ray lithography. On a conductive substrate a low dielectric constant thin film is deposited. A piezoelectric film is deposited on the low dielectric constant thin film. An electrode array is positioned on the piezoelectric film to provide a relatively uniform electric field across the electrode array. The structure may be oriented around or in the X-ray exposure area. If located outside it may be orthogonally or circularly placed about the exposure area.

REFERENCES:
patent: 4887283 (1989-12-01), Hosono

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