Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1998-02-24
1999-08-03
Rosasco, S.
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
430 22, G03F 900
Patent
active
059323779
ABSTRACT:
A two-step method for eliminating transmission errors in alternating phase-shifting masks is described. Initially, the design data is selectively biased to provide a coarse reduction in the inherent transmission error between features of different phase, size, shape, and/or location. During fabrication of the mask with the modified data, residual transmission errors are then eliminated via the positioning of the edges of the etched-quartz trenches which define the phase of a given feature to a set location beneath the opaque chrome film. Application of feedback, in which the aerial image of the mask is monitored during the positioning of the etched-quartz edges, provides additional and precise control of the residual transmission error.
REFERENCES:
Kostelak, et al, Explosure Characteristics of Alternate Aperture Phase-Shifting Mask Fabricated Using a Subtractive Process J. Vac. Sci, Technol. B (10)6, Nov./Dec. 1992, pp. 3055-3061.
Wong, et al, Mask Topography Effects In Projection Printing of Phase-Shifting Masks IEEE Transactions on Electron Devices, v. 41, No. 6, Jun. 1994, pp. 895-902.
Chieu, et al, Fabrication of Phase Shifting Mask Employing Multi-Layer Films Proceedings SPIE, vol. 2197, 1994, pp. 181-193.
Ferguson, et al, Pattern-Dependent Correction of Mask Topography Effects For Alternating Phase-Shifting Masks Proceedings of SPIE, vol. 2440, 1995, pp. 349-360.
Ferguson Richard A.
Liebmann Lars W.
Mansfield Scott M.
O'Grady David S.
Wong Alfred K.
International Business Machines - Corporation
Rosasco S.
Schnurmann H. Daniel
LandOfFree
Exact transmission balanced alternating phase-shifting mask for does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Exact transmission balanced alternating phase-shifting mask for , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Exact transmission balanced alternating phase-shifting mask for will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-848396