Method for fabricating with ultrasonic vibration a carbon coatin

Details Method for fabricating with ultrasonic vibration a carbon coatin Method for fabricating with ultrasonic vibration a carbon coatin

1997-08-13

1999-08-03

King, Roy V.

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

427600, 427249, 4272555, 427127, B05D 306, C23C 1626, B06B 100

Patent

active

059323027

ABSTRACT:
In a process for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions and the coating contains pin-holes having a density of 30/mm.sup.2 or less.

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J.W. Coburn in "Plasma Etching and RIE" AVS Monograph Series, 1982, pp. 6-11. No month data|.

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