Method for selective formation of a deposited film

Details Method for selective formation of a deposited film Method for selective formation of a deposited film

1993-01-19

1995-02-28

Chea, Thorl

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430314, 430317, 430323, G03F 700

Patent

active

053936469

ABSTRACT:
A method for selective formation of a deposited film comprises forming selectively a deposited film of a desired pattern on a deposition surface comprising a plurality of different kinds of materials formed corresponding to said pattern and providing different nucleus forming densities to the deposited film forming material.

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