Method of making a pattern

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device

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Details

430313, 430323, 430935, 430271, 2041806, G03F 716, G03F 732

Patent

active

050734784

ABSTRACT:
A method of making a pattern of an electrically conductive material which comprises

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patent: 4592816 (1986-06-01), Emmons et al.
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patent: 4795693 (1989-01-01), Ors et al.
patent: 4828964 (1989-05-01), Brunsvold et al.
patent: 4920038 (1990-04-01), Budde et al.
patent: 4927742 (1990-05-01), Kohm

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