Radiant energy – Inspection of solids or liquids by charged particles
Patent
1997-06-19
1999-03-16
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
25022726, 250234, 73105, G01B 528
Patent
active
058833870
ABSTRACT:
An SPM cantilever comprises a cantilever portion shaped as a thin plate and extending between a proximal end and a free end, a supporting portion attached to one surface of the cantilever portion on a side of the proximal end, and a probe projecting from the other surface of the cantilever portion on a side of the free end of the cantilever portion the supporting member, and the cantilever portion and the probe are made of different materials.
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Matsuyama Katsuhiro
Takayama Michio
Berman Jack I.
Olympus Optical Co,. Ltd.
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