Low power gas detector

Coating processes – Electrical product produced – Metal coating

Patent

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Details

427123, 4271263, 4271265, 427226, 427 87, 148 627, 437143, 437141, B05D 512

Patent

active

047403870

ABSTRACT:
A gas detector includes a gas detecting element comprised of a metal oxide semiconductor material which changes its value of electrical resistance at an elevated temperature when it absorbs a gas. In one form, the gas detecting element is supported in the form of a bridge so as to increase its response speed by making thermal capacity as small as possible. In another form, the gas detecting element is supported in the form a cantilever, more preferably in the form of a ring as formed along the periphery of a overhang portion of a disc-shaped layer of electrically insulating material. Also provided is a process for manufacturing a thin film of metal oxide, which may be advantageously used as a gas detecting element of a gas detector or a transparent electrode, for example, in a liquid crystal panel.

REFERENCES:
patent: 4052271 (1977-10-01), Beer
patent: 4342792 (1982-08-01), Brown
patent: 4362765 (1982-12-01), Abe
patent: 4614669 (1986-09-01), Yannopoulos

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