4. Measuring and testing
  5. Gas analysis
  6. Detector detail

Junji Manaka

Inventor

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Atmosphere measuring device and flow sensor

Measuring and testing – Gas analysis – Ambient air
Patent

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Atmosphere sensor and method for manufacturing the sensor

Measuring and testing – Gas analysis – Detector detail
Patent

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Drive control apparatus for microsensor

Measuring and testing – Gas analysis – With compensation detail
Patent

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Etching method for forming air bridge pattern on silicon substra

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Patent

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Flow sensor

Measuring and testing – Volume or rate of flow – Thermal type
Patent

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Profile ID: LFUS-PAI-P-113638

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