Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1997-09-10
1999-03-16
Brahan, Thomas J.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
118719, 414331, C23C 1600
Patent
active
058821651
ABSTRACT:
An integrated modular multiple chamber vacuum processing system is disclosed. The system includes a load lock, may include an external cassette elevator, and an internal load lock wafer elevator, and also includes stations about the periphery of the load lock for connecting one, two or several vacuum process chambers to the load lock chamber. A robot is mounted within the load lock and utilizes a concentric shaft drive system connected to an end effector via a dual four-bar link mechanism for imparting selected R--.THETA. movement to the blade to load and unload wafers at the external elevator, internal elevator and individual process chambers. The system is uniquely adapted for enabling various types of IC processing including etch, deposition, sputtering and rapid thermal annealing chambers, thereby providing the opportunity for multiple step, sequential processing using different processes.
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Cheng David
Harari Isaac
Hoppe Peter D.
Maydan Dan
Somekh Sasson
Applied Materials Inc.
Brahan Thomas J.
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