Method for removing composite attached to material by dry etchin

Details Method for removing composite attached to material by dry etchin Method for removing composite attached to material by dry etchin

1992-12-15

1994-03-29

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156656, 156657, 1566591, 156662, 156665, 156668, 156345, 252 791, H01L 21306, B44C 122, C23F 100, B29C 3700

Patent

active

052981126

ABSTRACT:
A method and apparatus for removing a composite attached to a material to be treated by dry ashing using a gas including a halogen element and a gas including a hydrogen element or using a gas including fluorine, a gas including oxygen and a gas including chlorine in a reaction chamber containing the material therein for use in manufacturing a semiconductor device.

REFERENCES:
patent: 4734152 (1988-03-01), Geis et al.
patent: 4749440 (1988-06-01), Blackwood et al.
patent: 4818327 (1989-04-01), Davis et al.
Patent Abstracts of Japan 58-137836, Aug. 16, 1983.
Patent Abstracts of Japan, 60-106132, Jun. 11, 1985.
Patent Abstracts of Japan, 60-53023 Mar. 26, 1985.
S. K. Ghandi V.L.S.I. Fabrication Principles, 1983 John Wiley & Sons, Inc. New York pp. 502 & 503.

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