Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1996-02-26
1996-12-03
Monin, Jr., Donald L.
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257349, 257 66, 257 70, 257623, 437 44, 437 80, H01L 29784
Patent
active
055811027
ABSTRACT:
In a process for manufacturing a thin film transistor having a semiconductor layer constituting source and drain regions and a channel forming region, by the semiconductor layer being made thinner in the source and drain regions than in the channel forming region a structure is realized wherein, at the boundary between the source region and the channel forming region and the boundary between the drain region and the channel forming region, portions where electric field concentrations occur are displaced from the portion where a channel is formed. By reducing the OFF current (the leak current) without also reducing the ON current, a high mutual conductance is realized.
REFERENCES:
patent: 5308998 (1994-05-01), Yamazaki et al.
Ferguson Jr. Gerald J.
Monin, Jr. Donald L.
Semiconductor Energy Laboratory Co,. Ltd.
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