Radiant energy – Inspection of solids or liquids by charged particles
Patent
1991-02-01
1992-09-01
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
250307, G01N 2300
Patent
active
051441284
ABSTRACT:
An atomic force microscope is provided for sensing displacement of a cantilever based on scanning tunneling microscopy. The atomic force microscope includes a cantilever moving system which allows the cantilever to be moved or slipped between an STM tip and a sample. This results in the microscope being able to carry out atomic force microscopy and tunneling microscopy without changing a single STM tip and to control the very small force between the sample and the tip to be constant.
REFERENCES:
patent: 4798989 (1989-01-01), Miyazaki et al.
Albrecht et al., Journal of Applied Physics, No. 62 (1987), pp. 2599-2602.
Heingelmann et al., Journal of Vacuum Sciency Technology, A6 (1988), pp. 275-278.
Kirk et al., Rev. Sci. Instrum. 59(6), Jun. 1988, pp. 833-835.
Hasegawa Tsuyoshi
Honda Yukio
Hosaka Sumio
Hosoki Shigeyuki
Ichikawa Masakazu
Berman Jack I.
Hitachi , Ltd.
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