Method of making edge-aligned implants and electrodes therefor

Details Method of making edge-aligned implants and electrodes therefor Method of making edge-aligned implants and electrodes therefor

1985-07-01

1986-09-23

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

29576R, 29580, 29591, 148187, 148190, 156653, 156657, 156662, 357 24, 357 59, 357 91, 427 85, 427 93, H01L 21306, B44C 122, C03C 1500, C23F 102

Patent

active

046134026

ABSTRACT:
There is disclosed a process particularly suited for making CCD's. The process comprises the steps of

REFERENCES:
patent: 3911560 (1975-10-01), Amelio et al.
patent: 4035906 (1977-07-01), Tasch et al.
patent: 4228445 (1980-10-01), Tasch et al.
patent: 4229752 (1980-10-01), Hynecek
patent: 4459325 (1984-07-01), Nozawa et al.
patent: 4548671 (1985-10-01), Kosonocky et al.
"Novel Fine Line Patterning Technique for Submicron Devices Based on Selective Oxidation of Aluminum", 42, Appl. Phys. Lett., No. 5, pp. 442-444 (3/1/83).

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