Apparatus for detecting and aligning a substrate

Details Apparatus for detecting and aligning a substrate Apparatus for detecting and aligning a substrate

1995-02-15

1997-06-10

Merritt, Karen B.

Material or article handling

Movable rack having superposed, charge-supporting elements,...

Rack moved vertically by elevating means

414416, 414936, 4147891, B65G 4724

Patent

active

056369603

ABSTRACT:
An apparatus according to the present invention includes a cassette in which a plurality of substrates are stored, a contact guide member provided to face a side surface of the cassette, and pressing end surfaces of substrates stored in the cassette, an alignment device for moving the contact guide member to approach the cassette, and pressing the contact guide member against the end surfaces of the substrates in the cassette, thereby aligning the substrates all at one pressing time, and detectors, provided for the alignment device at positions corresponding to spaces of substrates held in the cassette, in the same or multiple number of the spaces for holding substrates, for detecting whether or not a substrate is present in each of the spaces for holding the substrates of the cassette.

REFERENCES:
patent: 4776745 (1988-10-01), Foley
patent: 4892455 (1990-01-01), Hine
patent: 5225691 (1993-07-01), Powers et al.
patent: 5239182 (1993-08-01), Tateyama et al.
patent: 5306380 (1994-04-01), Hiroki
patent: 5374147 (1994-12-01), Hiroki et al.
patent: 5383759 (1995-01-01), Lin
patent: 5418382 (1995-05-01), Blackwood et al.
patent: 5439547 (1995-08-01), Kumagai
patent: 5468112 (1995-11-01), Ishii et al.
patent: 5509771 (1996-04-01), Hiroki

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