Method and apparatus for monitoring generation of liquid chemica

Details Method and apparatus for monitoring generation of liquid chemica Method and apparatus for monitoring generation of liquid chemica

1997-09-03

1999-10-26

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

2611191, 2611211, C23C 1600

Patent

active

059721170

ABSTRACT:
In a method and apparatus for producing a vapor containing a liquid chemical by bubbling a carrier gas through a mass of the liquid chemical, vapor production is monitored by: determining successive values of the pressure of the carrier gas being delivered to the mass of liquid chemical, over a time period; and calculating, on the basis of the successive values of the pressure, the frequency of bubble formation during the bubbling of the carrier gas.

REFERENCES:
patent: 4393013 (1983-07-01), McMenamin
patent: 4553431 (1985-11-01), Nicolai
patent: 5535624 (1996-07-01), Lehmann
patent: 5760294 (1998-06-01), Lehmann
PCT search report issued in application No. PCT/US98/09702.
Guillot, A. and Dantzer, P., Determination of Volumes by Gas Expansion, Journal of Physics E/Scientific Instruments; vol. 19 (1986) Dec. No. 12, Woodbury NY, USA.
Search Report issued on Dec. 21, 1998 in PCT/US98/18451.
U.S. Patent Appln. Serial No. 09/094,401 filed Apr. 22, 1998 (Atty.Dkt. 1715/MD/PVD/DV).
U.S. patent application serial No. 08/928,371, filed Sep. 12, 1997 (Atty. Dk. # 2041/PVD/DV).
U.S. patent application serial No. 08/870,961, filed Jun. 6, 1997 (Atty. Dk. #1688/PVD/DV).
U.S. Serial No. 09/064,401 Jun. 30, 1998 Declaration of inventor, John V. Schmitt.

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