Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Patent
1993-06-02
1995-01-17
James, Andrew J.
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
257417, 257415, H01L 2984, H01L 2996
Patent
active
053828232
ABSTRACT:
A semiconductor device includes a cavity portion formed in a supporting portion made of a semiconductor material so as to be surrounded by the supporting portion, and a silicon oxynitride film supported on one surface of the supporting portion so as to cover the cavity portion on the side of the one surface or a silicon oxynitride film supported on one surface of the supporting portion and so arranged as to form a bridged structure over the cavity portion. The composition of the silicon oxynitride film is selected in accordance with the material of the supporting portion. The former semiconductor device is produced by forming a silicon oxynitride film on one surface of a semiconductor substrate, forming an etching resistant film which has a pattern of a cavity portion, on another surface of the semiconductor substrate, and forming the cavity portion by selectively etching the semiconductor substrate using the etching resistant film as a mask until the formed cavity portion reaches said silicon oxynitride film. The latter semiconductor device is produced by the same process except that another step for patterning the silicon oxynitride film to form a bridge structure is included.
REFERENCES:
Article entitled "A Novel Four Electrode Electrochemical Etch-Stop Method for Silicon Membrane Formation" by Kleock et al. published Transducers '87 pp. 116-119, 1987.
Article entitled "The Mechanism of Anisotropic Silicon Etching and Its Relevance for Micromachining" by H. Seidel, published Transducers '87 pp. 120-125, 1987.
Research paper of Tohoku Branch Meeting of the Electricity related society of Japan (Shoji et al.), published in 1988 entitled Fundamental Research Relating to Formation of Thin Diaphragm by High Density Diffusion Using Borofilm.
Research paper of Tokoku-gakuin University (M. Kimura), vol. 20 No. 2 (May 1986), entitled Micro-Air-Bridge and Sensors.
Komatsu Kiyoshi
Kudo Takeshi
James Andrew J.
Meier Stephen D.
Terumo Kabushiki Kaisha
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