Method for the preparation of a frame-supported pellicle for pho

Details Method for the preparation of a frame-supported pellicle for pho Method for the preparation of a frame-supported pellicle for pho

Filed on

1993-08-06

Date issued

1994-11-29

Examiner

Simmons, David A.

Patent Class

Adhesive bonding and miscellaneous chemical manufacture

SubClass

Differential fluid etching apparatus

SubSubClass

With microwave gas energizing means

Other Related Categories

156584, 427164, 4273722, 427335, 4273897, 427409, 4273855, B32B 2700, B32B 700, G03F 900

Type

Patent

Status

active

Patent number

053686756

Description

ABSTRACT:
An improvement is proposed in the method for the preparation of a frame-supported pellicle involving a step in which a resin film for the pellicle membrane formed on the surface of a substrate plate by the solution casting method is adhesively bonded to a rigid pellicle frame and then the substrate plate is removed by separating from the resin film by pulling the substrate and the frame apart in a gaseous atmosphere of which the relative humidity is 80% or higher in contrast to the conventional procedures in which this step is conducted either in water or in a gaseous atmosphere of an air-conditioned clean room having a relative humidity never exceeding 60%. By virtue of this unique procedure, an outstandingly small number of dust particles are deposited on the pellicle membrane obtained by the removal of the substrate therefrom along with an advantage of very smooth and easy removal of the substrate not to cause slack or rupture of the membrane.

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patent: 5229229 (1993-07-01), Sato
patent: 5246767 (1993-09-01), Agou
patent: 5254419 (1993-10-01), Kashida
patent: 5286567 (1994-02-01), Kubota

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