Method and apparatus for forming nanometric features on surfaces

Details Method and apparatus for forming nanometric features on surfaces Method and apparatus for forming nanometric features on surfaces

1994-04-07

1996-04-30

Ro, Bentsu

Electricity: motive power systems

Positional servo systems

Program- or pattern-controlled systems

318625, 29 2501, 83 768, 83368, 83881, B26D 306

Patent

active

055128084

ABSTRACT:
An instrument for forming nanometric features on surfaces of materials having a motor driven support for moving a workpiece on an X-Y-Z axis, a scribing tool of nanometric proportion engagable with the workpiece and a laser system for sensing movement. The tool is mounted on piezoelectric actuating means and the entire system is under the control of a programmed computer processing unit.

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