Micro-pattern measuring apparatus

Details Micro-pattern measuring apparatus Micro-pattern measuring apparatus

1994-09-21

1996-04-30

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250306, 250251, G01N 23225

Patent

active

055127460

ABSTRACT:
A scanning electron microscope scans a sample with an electron beam in a transverse direction, to measure the size of the sample. The microscope has an electron gun for emitting an electron beam, a scan coil and an electron lens for periodically deflecting the electron beam, a detector for detecting a secondary electron signal, a unit for measuring the size of the sample according to the secondary electron signal and displaying the sample, and a probe for catching charged electrons on the sample. This microscope correctly measures the size of a sample that is made of easily-charged material such as photoresist or insulation material.

REFERENCES:
patent: 4567364 (1986-01-01), Kano et al.
patent: 4910398 (1990-03-01), Komatsu et al.
patent: 4992661 (1991-02-01), Tamura et al.
patent: 5241186 (1993-08-01), Yunogami et al.
patent: 5256876 (1993-10-01), Hazaki et al.

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