Pneumatically and electrostatically driven scanning tunneling mi

Details Pneumatically and electrostatically driven scanning tunneling mi Pneumatically and electrostatically driven scanning tunneling mi

1993-02-17

1994-02-01

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

369126, H01J 3726

Patent

active

052834379

ABSTRACT:
A scanning tunneling microscope is disclosed with the probe tip formed as an integral part of a membrane. A counter-electrode is formed on the membrane and four electrodes are provided spaced apart from the counter-electrode. The tip is scanned by means of these electrodes. Coarse positioning of the tip along the Z axis is done by applying pressure or vacuum to the membrane. Also disclosed is the method of making the scanning tunneling microscope.

REFERENCES:
patent: 4912822 (1990-04-01), Zdeblick et al.
patent: 4916002 (1990-04-01), Carver
Stylus for an Atomic Force Microscope, IBM Technical Disclosure Bulletin, vol. 32, No. 5A, pp. 10-12, Oct. 1989.

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