Process for producing nanometer-size structures on surfaces usin

Details Process for producing nanometer-size structures on surfaces usin Process for producing nanometer-size structures on surfaces usin

1992-09-30

1994-10-04

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156635, 156651, 156653, 427552, 427596, 427255, 437935, H01L 2100

Patent

active

053523300

ABSTRACT:
The process of using electron beam induced stimulated desorption chemistry to produce structures of nanometer order size on surfaces. By passivating a reconstructed surface and selectively removing such passivation with an electron beam through the electron stimulated desorption effect, the adsorption of other atoms and/or molecules is controlled at predetermined regions and/or lines on the surface.

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