Method of making liquid jet recording head

Details Method of making liquid jet recording head Method of making liquid jet recording head

1984-04-13

1985-08-20

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156656, 1566611, 346140R, C23F 102, B44C 122, C03C 1500, C03C 2506

Patent

active

045362505

ABSTRACT:
A method of making a liquid jet recording head having a liquid discharge section including orifice means for discharging the liquid to form flying droplets thereof and liquid passage means communicating with said orifice means and having a thermally acting portion for causing a thermal energy to act on the liquid to form the liquid droplets, and electro-thermal converting means including a heat generating resistive layer on a substrate, at least one pair of opposed electrodes electrically connected with said heat generating resistive layer and a heat generating part between said electrodes, which method comprises the steps of forming the electrodes and heat generating portion through at least first and second etching processes, a photoresist pattern formed by the first etching process having a width smaller than those of photoresist patterns formed by the second and successive etching processes.

REFERENCES:
patent: 4047184 (1977-09-01), Bassous et al.
patent: 4468282 (1984-08-01), Neukermans

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