Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1989-12-12
1992-01-14
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250306, 250307, H01J 3726
Patent
active
050813544
ABSTRACT:
A method of positioning electron-beam irradiation and a device used in such method comprising the steps of irradiating a desired portion of a specimen with an electron beam, forming an image of the electron beam which penetrates the specimen on a fluorescent screen, and positioning the electron beam irradiation to the above-mentioned specimen on the basis of the image of the specimen on the fluorescent screen obtained by scanning an electron beam over a range wider than the spot size of the electron beam on the surface of the specimen.
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U. Gross et al., "The microprocessor-controlled CM12/STEM scanning transmission electron microscope", vol. 43, No. 10, Nov. 1987.
Kobayashi Hiroyuki
Ohhashi Toshiyuki
Shii Kazuo
Berman Jack I.
Hitachi , Ltd.
Nguyen Kiet T.
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