Adjustment of particle beam landing angle

Details Adjustment of particle beam landing angle Adjustment of particle beam landing angle

1999-05-26

2000-02-22

Pham, Hoa Q.

Optics: measuring and testing

Focal position of light source

356138, 250396R, 250310, G01J 100, G01B 1126

Patent

active

060286628

ABSTRACT:
The invention relates to a method and apparatus for measuring The landing angle of a particle beam is adjusted by scanning the beam over two cylindrical beam target surfaces that are positioned close to the system axis. The output of a beam detector is differentiated and displayed on an oscilloscope. The relevant lens current is adjusted until one side of the scan indicates that the focal plane of the beam is at the center of the beam target. The angle of the beam is then adjusted with the relevant deflector until both sides of the scan are the same, indicating that the beam is accurately vertical.

REFERENCES:
patent: 4472055 (1984-09-01), Tsutsumi
patent: 5606261 (1997-02-01), Golladay

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