Method of making magneto-optical recording medium

Details Method of making magneto-optical recording medium Method of making magneto-optical recording medium

1989-06-19

1990-05-29

Nguyen, Nam X.

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419215, C23C 1434

Patent

active

049293206

ABSTRACT:
A method of making a magneto-optical recording medium comprises the step of forming a magneto-optical recording layer on a substrate by simultaneously carrying out direct current sputtering and radio-frequency sputtering. Alternatively, a magneto-optical recording layer composed of thin rare earth metal layers and thin transition metal layers overlaid alternately on a substrate is formed by carrying out radio-frequency sputtering by use of a target formed of a rare earth metal material and direct current sputtering by use of a target formed of a transition metal material.

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patent: 4684454 (1987-08-01), Gardner
L. D. Locker et al., "Preparation . . . Sputtering", J. Electrochem. Soc. vol. 118, No. 11, 11/71, pp. 1856-1862.
Kay et al., "Controlled Sputtering Process", IBM Tech. Disclosure Bull., vol. 12, No. 9, 2/70, 1358.

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