Method for producing metal ions

Details Method for producing metal ions Method for producing metal ions

1982-05-27

1985-01-29

Anderson, Bruce C.

Radiant energy

Ion generation

Arc type

250425, 250423R, 3133621, H01J 2700

Patent

active

044968434

ABSTRACT:
The invention provides a method for producing metal ions, having the steps of: producing a gas containing a metal element by evaporation of a liquid organic metal compound; introducing the gas containing the metal element and an auxiliary gas for cleaning into the ionization chamber; and producing the metal ions by ionizing the metal element by a discharge. According to this method, the metal ions are produced easily and quickly with good controllability.

REFERENCES:
patent: 2882408 (1959-04-01), Lofgren
patent: 4318029 (1982-03-01), Jergenson
patent: 4367429 (1983-01-01), Wang et al.

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