Microwave plasma source apparatus

Details Microwave plasma source apparatus Microwave plasma source apparatus

1990-09-05

1991-11-05

LaRoche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

315 39, 31323131, 333 99PL, H05H 146

Patent

active

050633295

ABSTRACT:
A microwave plasma source apparatus having a combination of a plane waveguide with a cylindrical coaxial waveguide. Microwave power is efficiently supplied to a body of discharge plasma produced inside a discharge tube located along the central axis of an inner conductor of the cylindrical coaxial waveguide. The plane waveguide has an open end through which to introduce microwave power and an end plate installed opposite to the open end. The cylindrical coaxial waveguide has its central axis located one quarter of the wavelength of the microwave power in use away from the end plate of the plane waveguide toward its open end. The inner and outer conductors of the cylindrical coaxial waveguide are coupled respectively with the bottom and upper walls of the plane waveguide. This arrangement allows the cylindrical coaxial waveguide to function as an efficient mode transformer addressing the microwave electromagnetic field formed in the plane waveguide. This in turn makes it possible to produce microwave plasma of large power at high degrees of efficiency.

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patent: 4609808 (1986-09-01), Bloyet et al.
patent: 4886966 (1989-12-01), Matsunaga et al.
patent: 4902099 (1990-02-01), Okamoto et al.
patent: 4908492 (1990-03-01), Okamoto et al.
patent: 4933650 (1990-06-01), Okamoto

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