Cathode structure for sputter ion pump

Details Cathode structure for sputter ion pump Cathode structure for sputter ion pump

1997-07-14

1999-12-21

Vrablik, John J.

Pumps

Electrical or getter type

Ionic with gettering

F04B 3702

Patent

active

060041048

ABSTRACT:
A sputter ion pump including an anode assembly comprising a plurality of hollow anode cells and cathode surfaces having open spirals disposed at each end of said anode cells.

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patent: 3319875 (1967-05-01), Jepsen
patent: 3452923 (1969-07-01), Lamont, Jr.
patent: 3460745 (1969-08-01), Lamont, Jr.
patent: 3546510 (1970-12-01), Klopfer et al.
patent: 3574569 (1971-04-01), Vordahl
patent: 4631002 (1986-12-01), Pierini

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