Robotic wafer handler

Details Robotic wafer handler Robotic wafer handler

1996-01-22

1998-05-05

Underwood, Donald W.

Material or article handling

Horizontally swinging load support

Swinging about pivot

414935, 901 15, 901 21, 7449004, B25J 906

Patent

active

057465657

ABSTRACT:
A robotic wafer handler has first and second arms pivotally connected at a swing point to operate in a plane. Each arm is independently drivable through greater than 360.degree. of rotation in the plane. The wafer handler may also include mechanisms for adjusting the plane of rotation, i.e., for providing lift and tilt.

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