Semiconductor wafer guides

Details Semiconductor wafer guides Semiconductor wafer guides

1986-11-05

1987-06-30

Nase, Jeffrey V.

Conveyors: fluid current

Having means for maintaining load in suspension along flow path

B65G 5103

Patent

active

046766995

ABSTRACT:
A device for positioning and proving movement to a semiconductor wafer. A pair of elongated members are attached to either side of a plate which is used during the processing of semiconductor wafers. The members are angled away from the center of the plate at the end which receives the wafer. Angled openings in the members are connected to a gas source which shoots a gas, such as air, from the openings to a assist in propelling the wafer and to prevent the wafer from contacting the member itself. The openings may also be used to introduce different atmospheres to the environment of the wafers during processing.

REFERENCES:
patent: 3582144 (1971-06-01), Woolard
patent: 4131320 (1978-12-01), Volat et al.
patent: 4352607 (1982-10-01), Loveless et al.

Affiliated with

Also associated with

Rating

Semiconductor wafer guides does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor wafer guides, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor wafer guides will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-445195