Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1986-08-18
1988-03-22
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
2505051, G01N 2300, H01J 3726
Patent
active
047330759
ABSTRACT:
An electron microscope is provided in which in order to monitor operating waveforms within the element of a semiconductor integrated circuit, an electron beam is bombarded from an electron gun to the measuring point of a specimen to be measured, the resultant secondary electron emitted from the specimen to be measured is detected by a secondary electron detector in order to build up an image, and in which the specimen to be measured is stroboscopically scanned by controlling the electron gun with sampling pulses. A shield electrode is mounted nearest to the measuring point of the specimen to be measured such that the influences of the adjacent potentials different from that of the measuring point of the specimen to be measured, can be eliminated.
REFERENCES:
patent: 3845305 (1974-10-01), Liebl
patent: 3876879 (1975-04-01), McAdams et al.
patent: 4255661 (1981-03-01), Liebl
Sato et al, "Electron Beam Testing Techniques for Dynamic Memory", 15th Conference on Solid State Devices and Materials, Tokyo, 1983, pp. 273, 276.
Sato et al, "Improvement of the EB Testing in 256K Dynamic RAM", Material for 85th Study Meeting of 132 Committee of Japan Science Promotion Society (Nov. 11-12, 1983).
L. J. Balk et al., "Quantitative Voltage Contrast at High Frequencies in the SEM", Scanning Electron Microscopy, 1976, pp. 615-624 (Apr. 1976).
Anderson Bruce C.
Kabushiki Kaisha Toshiba
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