Ion source device

Details Ion source device Ion source device

1986-12-17

1989-07-11

Anderson, Bruce G.

Radiant energy

Ion generation

Electron bombardment type

250423R, 3133601, H01J 2700

Patent

active

048474762

ABSTRACT:
An ion source device comprises a plasma generating vessel for generating plasma therein, a plurality of magnets arranged on an outer periphery of the plasma generating vessel to establish a cusp field in the plasma generating vessel, means for supplying a power to generate the plasma in the plasma generating vessel, and an anode electrode arranged on an inner wall of the plasma generating vessel and adapted to be heated by electrons emitted from the plasma and maintain the heat.

REFERENCES:
patent: 4277939 (1981-07-01), Hyman
patent: 4383177 (1983-05-01), Keller et al.
patent: 4431062 (1984-11-01), Kaufman et al.
patent: 4491735 (1985-01-01), Smith
patent: 4529571 (1985-07-01), Bacon et al.
patent: 4620102 (1986-10-01), Watanabe et al.
"High-Brightness High-Current ion Sources" Green, Int. Phys. Conf. Ser. No. 54, 1980, pp. 271-283.

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