Method for forming a pattern of a film on a substrate with a las

Details Method for forming a pattern of a film on a substrate with a las Method for forming a pattern of a film on a substrate with a las

1987-08-07

1988-11-22

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156638, 156656, 156667, 156902, 21912169, 21912185, 427 531, B44C 122, C03C 1500, C03C 2506, C23F 102

Patent

active

047863587

ABSTRACT:
An improved method for forming a pattern on a substrate coated with a film is shown. The substrate is irradiated with a laser beam which is shaped through a mask, and a portion of the film is removed by the energy of the laser beam to produce the desired pattern. The laser beam is emitted from an exmer laser.

REFERENCES:
patent: 3866398 (1975-02-01), Vernon et al.
patent: 3867217 (1975-02-01), Maggs et al.
patent: 4181563 (1980-01-01), Miyaka et al.
patent: 4358659 (1982-11-01), Spohnheimer
patent: 4508749 (1985-04-01), Brannon et al.

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