Gas-permeable plasma electrode, method for production of the...

Details Gas-permeable plasma electrode, method for production of the... Gas-permeable plasma electrode, method for production of the...

2005-06-21

2011-12-20

Gramaglia, Maureen (Department: 1716)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

Having glow discharge electrode gas energizing means

C156S345470, C118S7230ER

Reexamination Certificate

active

08080125

ABSTRACT:
A gas-permeable plasma electrode has an electrically conductive container with a base which has a hole, and a gas-permeable porous electrically conductive film, with the gas-permeable porous electrically conductive film being arranged opposite the base in the electrically conductive container and being connected to the electrically conductive container, and with the gas-permeable porous electrically conductive film having at least one layer of electrically conductive grains, at least some of which are arranged so as to form a gas-permeable film.

REFERENCES:
patent: 4367114 (1983-01-01), Steinberg et al.
patent: 5578129 (1996-11-01), Moriya
patent: 5595602 (1997-01-01), Harlan
patent: 5959409 (1999-09-01), Dornfest et al.
patent: 6118218 (2000-09-01), Yializis et al.
patent: 6451157 (2002-09-01), Hubacek
patent: 2004/0110059 (2004-06-01), Onishi et al.
patent: WO 03/001558 (2003-01-01), None

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