Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate
2009-10-09
2011-12-06
Vanore, David A (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
C250S251000, C250S306000, C250S311000, C250S441110
Reexamination Certificate
active
08071960
ABSTRACT:
In the case of a method for producing samples for transmission electron microscopy, a sample is prepared from a substrate of a sample material. To this end, the sample material is irradiated by means of a laser beam along an irradiation trajectory in order to produce a weak path in the sample material. The irradiation is controlled such that the weak path crosses a further weak path, which is likewise preferably produced by laser irradiation, running in the sample material, at an acute angle in a crossing region. The substrate is broken along the weak paths. A sample is thereby produced which has a wedge-shaped sample section bounded by fracture surfaces and has in the region of a wedge tip at least one electron-transparent region.
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3D-Micromac AG
Akerman & Senterfitt
Vanore David A
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