Micro oscillating comb tooth element with two interesecting...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating

Reexamination Certificate

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Details

C385S018000, C359S225100, C359S290000, C359S291000

Reexamination Certificate

active

08049394

ABSTRACT:
A micro oscillating element includes a frame and an oscillation section connected to the frame via a torsional joining section. The oscillation section includes a movable functional section, an arm section and a first comb-tooth electrode. The arm section extends from the functional section. The first comb-tooth electrode includes first electrode teeth extending from the arm section in a direction intersecting the arm section. The micro oscillating element further includes a second comb-tooth electrode to cooperate with the first comb-tooth electrode for causing the oscillation section to oscillate about an oscillation axis defined by the torsional joining section. The second comb-tooth, electrode includes second electrode teeth extending from the frame in a direction intersecting the arm section.

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Manual Translation of JP 2004-082288, Mar. 18, 2004, Murai et al., “Electrostatic Actuator and Optical Switch Using the Same”.

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