Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2009-07-22
2011-10-04
Hartman, Jr., Ronald D (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S097000, C700S100000, C700S108000, C700S111000, C700S121000, C700S177000, C700S179000, C702S184000, C702S185000, C702S190000
Reexamination Certificate
active
08032248
ABSTRACT:
A method for finding the correlation between tool PM (prevention maintenance) and the product yield of the tool is disclosed. The method uses a moving average method to magnify a curve trend that is formed by the product yield data that is captured during a predetermined days before PM and after PM. The magnified curve trend is shown by a Cumulative sum chart. The Cumulative sum chart is analyzed for informing related workers of the effect between the tool PM and the product yield, so as to accurately estimate PM timing. Thereby, via the method, the effect between the tool PM and the product yield may be determined, which serves as an important reference for workers to execute further PM.
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Chen Chun Chi
Chen Wei Jun
Lee Yi Feng
Lin Tsung-Wei
Tian Yun-Zong
Hartman Jr. Ronald D
Inotera Memories, Inc.
Kile Goekjian Reed & McManus PLLC
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